Chemical Vapor Infiltration Process Modeling and Optimization
نویسندگان
چکیده
منابع مشابه
On the Mathematical Analysis and Optimization of Chemical Vapor Infiltration †
In this paper we present an analysis of the partial differential equations that describe the Chemical Vapor Infiltration (CVI) processes. The mathematical model requires at least two partial differential equations, one describing the gas phase and one corresponding to the solid phase. A key difficulty in the process is the long processing times that are typically required. We address here the i...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 1995
ISSN: 0272-9172,1946-4274
DOI: 10.1557/proc-410-441